Design and Simulation of MEMS-based Z-Axis Capacitive Accelerometer

Authors

  • Shalu Rani  University Institute of Engineering and Technology, Kurukshetra University, Kurukshetra, Haryana, India
  • R. Mukhiya  CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India
  • C. C. Tripathi  University Institute of Engineering and Technology, Kurukshetra University, Kurukshetra, Haryana, India
  • B. D. Pant  CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India
  • Ram Gopal  CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

Keywords:

MEMS, Accelerometer, UV-LIGA, CoventorWare®.

Abstract

In this paper, a MEMS-based Z-axis capacitive accelerometer is designed and simulated. An out-of-plane Z-axis accelerometer designed for 8 µm UV-LIGA technology for an acceleration range of ±10g. The operating voltage is 5 V DC. Simulation results show good linear characteristics in the operating range of DC-400 Hz, which is the bandwidth of the accelerometer. The simulations of the device were carried out using CoventorWare®. By using modal analysis in CoventorWare® the resonating frequency of 3.1 kHz is obtained.

References

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International Journal of Scientific Research in Science and Technology

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Published

2015-10-25

Issue

Volume 1, Issue 4, September-October-2015

Section

Research Articles

License

Copyright (c) IJSRST

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This work is licensed under a Creative Commons Attribution 4.0 International License.

How to Cite

[1]
Shalu Rani, R. Mukhiya, C. C. Tripathi, B. D. Pant, Ram Gopal, " Design and Simulation of MEMS-based Z-Axis Capacitive Accelerometer, International Journal of Scientific Research in Science and Technology(IJSRST), Online ISSN : 2395-602X, Print ISSN : 2395-6011, Volume 1, Issue 4, pp.112-115, September-October-2015.