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Design and Simulation of MEMS-based Z-Axis Capacitive Accelerometer

Authors(5) :-Shalu Rani, R. Mukhiya, C. C. Tripathi, B. D. Pant, Ram Gopal

In this paper, a MEMS-based Z-axis capacitive accelerometer is designed and simulated. An out-of-plane Z-axis accelerometer designed for 8 µm UV-LIGA technology for an acceleration range of ±10g. The operating voltage is 5 V DC. Simulation results show good linear characteristics in the operating range of DC-400 Hz, which is the bandwidth of the accelerometer. The simulations of the device were carried out using CoventorWare®. By using modal analysis in CoventorWare® the resonating frequency of 3.1 kHz is obtained.

Shalu Rani, R. Mukhiya, C. C. Tripathi, B. D. Pant, Ram Gopal
MEMS, Accelerometer, UV-LIGA, CoventorWare®.
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Publication Details
  Published in : Volume 1 | Issue 4 | September-October 2015
  Date of Publication : 2015-10-25
License:  This work is licensed under a Creative Commons Attribution 4.0 International License.
Page(s) : 112-115
Manuscript Number : IJSRST151430
Publisher : Technoscience Academy
PRINT ISSN : 2395-6011
ONLINE ISSN : 2395-602X
Cite This Article :
Shalu Rani, R. Mukhiya, C. C. Tripathi, B. D. Pant, Ram Gopal, "Design and Simulation of MEMS-based Z-Axis Capacitive Accelerometer", International Journal of Scientific Research in Science and Technology(IJSRST), Print ISSN : 2395-6011, Online ISSN : 2395-602X, Volume 1, Issue 4, pp.112-115, September-October-2015
URL : http://ijsrst.com/IJSRST151430