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FEM Simulations of Z-axis MEMS Capacitive Energy Harvester using Various Beams

Authors(2) :-Hitesh Kumar Sharma, Jit.Dutta

This paper represents the Finite element modeling of Z-axis MEMS capacitive energy harvester and analysis of spring constant of various type of springs, used in MEMS capacitive energy harvesting system and its effect at the resonance frequency. In this paper, FEM simulations of MEMS capacitive energy harvester along with three different types of springs are carried out using COMSOL Multiphysics tool. The theory of spring constant is discussed along with mathematical model. For simulations, three flexure springs (Linear, single serpentine, double serpentine) of width 12µm and thickness 8µm is used. The length of the spring for linear beam and single serpentine beam is used 264 um and for double serpentine beam is 330 µm. The dimension of the capacitive plate is used 2000 µm × 2000 µm with thickness of 8 µm. This plate is used with three different types of springs, 3-D model is meshed and appropriate boundary conditions are applied to calculate the spring constant.

Hitesh Kumar Sharma, Jit.Dutta
Spring Constant, COMSOL Multiphysics Tool, MEMS Capacitive Energy Harvester.
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Publication Details
  Published in : Volume 1 | Issue 5 | November-December 2015
  Date of Publication : 2015-12-25
License:  This work is licensed under a Creative Commons Attribution 4.0 International License.
Page(s) : 149-152
Manuscript Number : IJSRST151531
Publisher : Technoscience Academy
PRINT ISSN : 2395-6011
ONLINE ISSN : 2395-602X
Cite This Article :
Hitesh Kumar Sharma, Jit.Dutta, "FEM Simulations of Z-axis MEMS Capacitive Energy Harvester using Various Beams", International Journal of Scientific Research in Science and Technology(IJSRST), Print ISSN : 2395-6011, Online ISSN : 2395-602X, Volume 1, Issue 5, pp.149-152, November-December-2015
URL : http://ijsrst.com/IJSRST151531