FEM Simulations of Z-axis MEMS Capacitive Energy Harvester using Various Beams

Authors

  • Hitesh Kumar Sharma  Materials Research Centre, Malaviya National Institute of Technology, Jaipur, Rajasthan, India
  • Jit.Dutta  Materials Research Centre, Malaviya National Institute of Technology, Jaipur, Rajasthan, India

Keywords:

Spring Constant, COMSOL Multiphysics Tool, MEMS Capacitive Energy Harvester.

Abstract

This paper represents the Finite element modeling of Z-axis MEMS capacitive energy harvester and analysis of spring constant of various type of springs, used in MEMS capacitive energy harvesting system and its effect at the resonance frequency. In this paper, FEM simulations of MEMS capacitive energy harvester along with three different types of springs are carried out using COMSOL Multiphysics tool. The theory of spring constant is discussed along with mathematical model. For simulations, three flexure springs (Linear, single serpentine, double serpentine) of width 12µm and thickness 8µm is used. The length of the spring for linear beam and single serpentine beam is used 264 um and for double serpentine beam is 330 µm. The dimension of the capacitive plate is used 2000 µm × 2000 µm with thickness of 8 µm. This plate is used with three different types of springs, 3-D model is meshed and appropriate boundary conditions are applied to calculate the spring constant.

References

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  2. Giuseppe Barillaro, AntonioMolfese, Andrea Nannini and Francesco Pieri (2005), “Analysis, Simulation and relative performances of two kinds of serpentine springs”, J. Micromech. Microeng. 15:736-746
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  6. COMSOL Multiphysics Tool

International Journal of Scientific Research in Science and Technology

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Published

2015-12-25

Issue

Volume 1, Issue 5, November-December-2015

Section

Research Articles

License

Copyright (c) IJSRST

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.

How to Cite

[1]
Hitesh Kumar Sharma, Jit.Dutta "FEM Simulations of Z-axis MEMS Capacitive Energy Harvester using Various Beams" International Journal of Scientific Research in Science and Technology(IJSRST), Online ISSN : 2395-602X, Print ISSN : 2395-6011,Volume 1, Issue 5, pp.149-152, November-December-2015.